Title :
Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516)
Abstract :
The following topics are dealt with: microelectronic test structures; reliability and system integration; critical dimension metrology; RF design and measurement; interconnects; process characterization; device matching; device characterization; leakage currents; parameter extraction; capacitance measurement.
Keywords :
capacitance measurement; integrated circuit interconnections; integrated circuit measurement; integrated circuit reliability; integrated circuit testing; leakage currents; semiconductor device measurement; semiconductor device reliability; semiconductor device testing; semiconductor process modelling; RF design; RF measurement; capacitance measurement; critical dimension metrology; device characterization; device matching; interconnects; leakage currents; microelectronic test structures; parameter extraction; process characterization; reliability; system integration;
Conference_Titel :
Microelectronic Test Structures, 2004. Proceedings. ICMTS '04. The International Conference on
Conference_Location :
Awaji Yumebutai, Japan
Print_ISBN :
0-7803-8262-5
DOI :
10.1109/ICMTS.2004.1309284
