Title :
Influence of different lead precursors on the microstructure and properties of sol-gel PZT thin films
Author :
Kosec, M. ; Delalut, U. ; Malic, Barbara ; Bobnar, V. ; Drazic, G.
Author_Institution :
Jozef Stefan Inst., Ljubljana Univ., Slovenia
Abstract :
Sol-gel derived Pb(Zr0.53Ti0.47)O3 films were prepared by spin coating on platinum coated silicon wafers. The sol for deposition was prepared from Zr and Ti alkoxides and different lead precursors-standard lead acetate hydrate and a new lead oxide based precursor. Crystallisation, microstructure and hysteresis properties of these films were studied and compared in order to reveal the features of the two synthesis methods employed
Keywords :
dielectric hysteresis; ferroelectric thin films; lead compounds; piezoceramics; sol-gel processing; PZT; PbZrO3TiO3; crystallisation; hysteresis; lead acetate hydrate; lead oxide; lead precursor; microstructure; sol-gel PZT thin film; spin coating; synthesis; Chemicals; Crystallization; Ferroelectric films; Hysteresis; Lead compounds; Microstructure; Temperature; Transistors; X-ray scattering; Zirconium;
Conference_Titel :
Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on
Conference_Location :
East Brunswick, NJ
Print_ISBN :
0-7803-3355-1
DOI :
10.1109/ISAF.1996.602784
