Title :
A dual axis silicon gyroscope based on thermal convective effect [ship applications]
Author :
Dau, Van Thanh ; Shiozawa, Tatsuo ; Dao, Dzung Viet ; Kumagai, Hideo ; Sugiyama, Susumu
Abstract :
This paper presents the design, simulation and fabrication of a dual axis semiconductor gas gyroscope. The sensor configuration consists of a piezoelectric pump and a micro thermal sensing element, packaged in an aluminum case with diameter and length of 14 mm and 25 mm, respectively. Good agreement between the sensitivity simulation results and the experimental data has been realized. This sensor is to be applied in ship anti-rolling and stabilization systems.
Keywords :
angular velocity measurement; convection; gyroscopes; marine systems; micropumps; microsensors; piezoelectric actuators; thermistors; 14 mm; 25 mm; Al; Si; angular rate measurement; dual axis gyroscope; hotwire device; micro thermal sensing element; micro thermistor wire; piezoelectric diaphragm pump; semiconductor gas gyroscope; sensor sensitivity; ship anti-rolling systems; ship stabilization systems; thermal convective effect gyroscope; thermoresistive effect; Acceleration; Aluminum; Fabrication; Fluid flow; Fluid flow measurement; Gyroscopes; Packaging; Silicon; Thermistors; Wires;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426154
