DocumentCode
3117980
Title
A dual axis silicon gyroscope based on thermal convective effect [ship applications]
Author
Dau, Van Thanh ; Shiozawa, Tatsuo ; Dao, Dzung Viet ; Kumagai, Hideo ; Sugiyama, Susumu
fYear
2004
fDate
24-27 Oct. 2004
Firstpage
272
Abstract
This paper presents the design, simulation and fabrication of a dual axis semiconductor gas gyroscope. The sensor configuration consists of a piezoelectric pump and a micro thermal sensing element, packaged in an aluminum case with diameter and length of 14 mm and 25 mm, respectively. Good agreement between the sensitivity simulation results and the experimental data has been realized. This sensor is to be applied in ship anti-rolling and stabilization systems.
Keywords
angular velocity measurement; convection; gyroscopes; marine systems; micropumps; microsensors; piezoelectric actuators; thermistors; 14 mm; 25 mm; Al; Si; angular rate measurement; dual axis gyroscope; hotwire device; micro thermal sensing element; micro thermistor wire; piezoelectric diaphragm pump; semiconductor gas gyroscope; sensor sensitivity; ship anti-rolling systems; ship stabilization systems; thermal convective effect gyroscope; thermoresistive effect; Acceleration; Aluminum; Fabrication; Fluid flow; Fluid flow measurement; Gyroscopes; Packaging; Silicon; Thermistors; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2004. Proceedings of IEEE
Print_ISBN
0-7803-8692-2
Type
conf
DOI
10.1109/ICSENS.2004.1426154
Filename
1426154
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