Title :
Mass Sensitive Thin Film Bulk Acoustic Wave Resonators
Author :
Loschonsky, M. ; Eisele, D. ; Reindl, L.M.
Author_Institution :
Dept. of Microsyst. Eng., Freiburg Univ.
Abstract :
The mass sensitive effect of RF-filter technology based film and a solidly-mounted acoustic bulk wave single resonator (FBARs and SBARs) is investigated for metrological use. For a high resolution of a sensor system all systematical errors like cross temperature sensitivity must be eliminated. A high quality factor Q is needed for stable oscillating for minimizing statistical errors. Experiments using FBAR and SBAR single resonators have been carried out in a vapor deposition facility and thermal chamber to analyze mass and temperature sensitive effects. The usage of more than one resonant mode with distinct polarization might allow the compensation of cross sensitivities
Keywords :
error statistics; radiofrequency filters; surface acoustic wave resonators; thin films; bulk acoustic wave resonators; cross temperature sensitivity; high quality factor; mass sensitive thin film; radiofrequency filter; statistical errors; Acoustic waves; Band pass filters; Chemical technology; Film bulk acoustic resonators; Frequency; Q factor; Resonance; Resonator filters; Temperature sensors; Transistors;
Conference_Titel :
International Frequency Control Symposium and Exposition, 2006 IEEE
Conference_Location :
Miami, FL
Print_ISBN :
1-4244-0074-0
Electronic_ISBN :
1-4244-0074-0
DOI :
10.1109/FREQ.2006.275361
