Model of capacitive micromechanical accelerometer including effect of squeezed gas film

Author

Veijola, Timo ; Ryhanen, Tapani

Author_Institution

Circuit Theory Lab., Helsinki Univ. of Technol., Espoo, Finland

Volume

1

fYear

1995

fDate

30 Apr-3 May 1995

Firstpage

664

Abstract

An electrical component model for a micromechanical accelerometer is presented. In addition to the varying capacitances, the motion of the seismic mass and the damping gas films are described by means of an electrical equivalent circuit. The resulting model can be analyzed together with the interfacing electronics utilizing all analysis modes available in a circuit simulator. The model has been implemented in the general purpose circuit simulation tool APLAC. The model simulations show an excellent match with the measured frequency responses

Keywords

accelerometers; capacitance measurement; equivalent circuits; frequency-domain analysis; microsensors; time-domain analysis; APLAC; analysis modes; capacitive micromechanical accelerometer; circuit simulation tool; electrical component model; electrical equivalent circuit; frequency responses; seismic mass; squeezed gas film; Accelerometers; Capacitance; Circuit simulation; Damping; Differential equations; Lubrication; Micromechanical devices; Nonlinear equations; Structural beams; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 1995. ISCAS '95., 1995 IEEE International Symposium on

Conference_Location

Seattle, WA

Print_ISBN

0-7803-2570-2

Type

conf

DOI

10.1109/ISCAS.1995.521601

Filename

521601