Title :
Model of capacitive micromechanical accelerometer including effect of squeezed gas film
Author :
Veijola, Timo ; Ryhanen, Tapani
Author_Institution :
Circuit Theory Lab., Helsinki Univ. of Technol., Espoo, Finland
fDate :
30 Apr-3 May 1995
Abstract :
An electrical component model for a micromechanical accelerometer is presented. In addition to the varying capacitances, the motion of the seismic mass and the damping gas films are described by means of an electrical equivalent circuit. The resulting model can be analyzed together with the interfacing electronics utilizing all analysis modes available in a circuit simulator. The model has been implemented in the general purpose circuit simulation tool APLAC. The model simulations show an excellent match with the measured frequency responses
Keywords :
accelerometers; capacitance measurement; equivalent circuits; frequency-domain analysis; microsensors; time-domain analysis; APLAC; analysis modes; capacitive micromechanical accelerometer; circuit simulation tool; electrical component model; electrical equivalent circuit; frequency responses; seismic mass; squeezed gas film; Accelerometers; Capacitance; Circuit simulation; Damping; Differential equations; Lubrication; Micromechanical devices; Nonlinear equations; Structural beams; Viscosity;
Conference_Titel :
Circuits and Systems, 1995. ISCAS '95., 1995 IEEE International Symposium on
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2570-2
DOI :
10.1109/ISCAS.1995.521601
