A nanoparticle-based microsensor for room temperature hydrogen detection

Author

Rajnikant, Agrawal ; Shukla, Satyajit ; Ludwig, Lawrence ; Anjum, Mehta ; Cho, Hyoung J. ; Seal, Sudipta

Author_Institution

Dept. of Electr. Eng., Univ. of Central Florida, Orlando, FL, USA

fYear

2004

fDate

24-27 Oct. 2004

Firstpage

395

Abstract

In this work, we report a novel micromachined hydrogen sensor operating at room temperature. The sensor has been successfully designed and fabricated, based on interdigitated conductometric microelectrodes integrating indium oxide (In₂O₃)-doped tin oxide (SnO₂) semiconductor nanocrystalline particles with platinum (Pt) nanoclusters. Very high H₂ sensitivity (110×10³) with fast response and recovery has been observed for the presented sensor at room temperature and low hydrogen gas concentration. The nanomaterial/microdevice integration for a highly efficient sensor device with unprecedented functions has been explored and investigated systematically.

Keywords

gas sensors; hydrogen; indium compounds; microelectrodes; microsensors; nanoparticles; platinum; tin compounds; 293 to 298 K; Pt; SnO₂:In₂O₃; interdigitated conductometric microelectrodes; low gas concentration sensitivity; metallic nanoclusters; micromachined sensor; nanomaterial/microdevice integration; nanoparticle-based microsensor; room temperature gas detection; Gas detectors; Hydrogen; Indium; Microelectrodes; Microsensors; Nanoscale devices; Platinum; Sensor systems; Temperature sensors; Tin;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2004. Proceedings of IEEE

Print_ISBN

0-7803-8692-2

Type

conf

DOI

10.1109/ICSENS.2004.1426182

Filename

1426182