DocumentCode
3118732
Title
Study of nano Fe2 O3 MOS thick films as ethanol gas sensor
Author
Jain, G.H. ; Pawar, N.K.
Author_Institution
Dept. of Phys., Arts, Commerce & Sci. Coll., Nandgaon, India
fYear
2011
fDate
Nov. 28 2011-Dec. 1 2011
Firstpage
116
Lastpage
119
Abstract
Thick films of AR Grade nano Fe2O3 material with n type semiconducting properties were prepared and tested for their gas sensing performances. Thick films of the materials were prepared by screen printing technique. The gas sensing performance was studied using static gas sensing system. The material was tested for various gases such as CO, CO2, NH3, Cl2, H2, LPG, ethanol and H2S. The nano Fe2O3 film showed maximum sensitivity to Ethanol gas at 350°C temperature and at 250 ppm concentration with short response time and large recovery time. Physical and structural properties of the films material were studied by TEM, XRD.
Keywords
MIS devices; gas sensors; iron compounds; nanosensors; thick films; Fe2O3; MOS thick films; TEM; XRD; ethanol gas sensor; screen printing technique; sensitivity; structural properties; temperature 350 degC; Ethanol; Gas detectors; Materials; Ethanol; Gas sensor; Nano Fe2 O3 ; sensitivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensing Technology (ICST), 2011 Fifth International Conference on
Conference_Location
Palmerston North
ISSN
2156-8065
Print_ISBN
978-1-4577-0168-9
Type
conf
DOI
10.1109/ICSensT.2011.6136944
Filename
6136944
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