A digital demodulation solution to achieve stable driving for a micro-machined gyroscope with an AGC mechanism

Author

Jiwei, Jiao ; Ming, Han ; Xiangli, Wang ; Yong, Chen ; Yuelin, Wang

Author_Institution

State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China

fYear

2004

fDate

24-27 Oct. 2004

Firstpage

429

Abstract

This paper presents a digital solution to restrain the impact of the unwanted low-frequency signal on the practical driving signal, i.e. carrier signal, in a MEMS gyroscope with automatic gain control (AGC) mechanism. For this purpose, an ASIC has been designed and fabricated. With digital signal processing (DSP) techniques, the digital demodulated angular rate signal is adjusted by using a self-multiplied practical carrier signal after LPF in a digital divider. The simulation gives an SNR of better than 70 dB, which indicates that good device performance can be possibly achieved with this principle even though the driving is not ideal.

Keywords

application specific integrated circuits; automatic gain control; circuit stability; demodulation; digital signal processing chips; driver circuits; gyroscopes; high-pass filters; low-pass filters; microsensors; AGC mechanism; ASIC; DSP; LPF; MEMS; SNR; automatic gain control; digital demodulated angular rate signal; digital demodulation; digital divider; digital signal processing; driving signal stability; high pass filter; micromachined gyroscope; self-multiplied practical carrier signal; unwanted low-frequency driving signal component; vibratory gyroscopes; Application specific integrated circuits; Capacitance-voltage characteristics; Demodulation; Digital signal processing; Frequency; Gain control; Gyroscopes; Laboratories; Micromechanical devices; Signal processing;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2004. Proceedings of IEEE

Print_ISBN

0-7803-8692-2

Type

conf

DOI

10.1109/ICSENS.2004.1426191

Filename

1426191