Resonant Properties of GaPO4 Resonator Device Coated with Plasma Polymerized Styrene Film

Author

Aizawa, Hidenobu ; Inoue, Yoshiharu ; Yamada, Kazunori ; Hirata, Mitsuo ; Koyama, Mitsuaki ; Kurosawa, Shigeru

Author_Institution

National Inst. of Adv. Ind. Sci. & Technol., Tsukuba

fYear

2006

fDate

38869

Firstpage

318

Lastpage

321

Abstract

Recently, quartz crystal microbalance (QCM) techniques have found widely applications in chemical and biosensor. The quartz crystal of AT-cut used for the QCM method. This cutting mode of quartz crystal device shows good temperature-compensated behavior of the resonant frequency around room temperature, but the maximum operating temperature is limited due to the phase transition near 570 degree C. For this weak point, QCM technique limited low temperature applications under 200 degrees C. In this study, the resonant properties of GaPO₄ resonator coated with plasma-polymerized styrene film (PPSF) as mass loading effect were examined and compared with that of QCM device

Keywords

crystal resonators; gallium compounds; microbalances; polymer films; polymerisation; GaPO₄; mass loading effect; phase transition; plasma polymerized styrene film; quartz crystal device cutting mode; quartz crystal microbalance techniques; resonant frequency; resonant properties; resonator device; Biosensors; Chemicals; Plasma applications; Plasma chemistry; Plasma devices; Plasma properties; Plasma temperature; Polymer films; Resonance; Resonant frequency; Gallium phosphate (GaPO4); plasma-polymerized styrene film (PPSF); quartz crystal microbalance (QCM); resonant properties;

fLanguage

English

Publisher

ieee

Conference_Titel

International Frequency Control Symposium and Exposition, 2006 IEEE

Conference_Location

Miami, FL

Print_ISBN

1-4244-0074-0

Electronic_ISBN

1-4244-0074-0

Type

conf

DOI

10.1109/FREQ.2006.275405

Filename

4053783