Large-volume integrated capillary electrophoresis stage fabricated using micromachining of plastics on silicon substrates

Author

Webster, J.R. ; Mastrangelo, C.H.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

503

Abstract

A micromachined capillary electrophoresis separation stage has been fabricated on top of a silicon substrate that contains sample reservoirs, platinum electrodes, and a passivated diode designed for the detection of migrating DNA fluorescing fragments. The 20 μm-high separation stage channels were constructed using a low-temperature, three polymer process that produces optically transparent, hermetic fluidic systems over topologically structured, non-flat substrates. Successful separation of DNA fragments was achieved in 0.46 cm with fragment mobilities between 1.2-1.05 μm·cm/V·s using a bias of 12.8 V/cm in approximately 5 minutes

Keywords

biological techniques; biosensors; capillarity; chemical analysis; electrophoresis; elemental semiconductors; microelectrodes; micromechanical devices; photodiodes; platinum; semiconductor technology; silicon; 20 mum; 5 min; Pt; Pt electrodes; Si; Si photodiode; Si substrates; integrated capillary electrophoresis; micromachining; migrating DNA fluorescing fragments; optically transparent hermetic fluidic systems; passivated diode; plastics; sample reservoirs; separation stage channels; three polymer process; topologically structured substrates; DNA; Electrokinetics; Micromachining; Optical films; Optical filters; Optical sensors; Plastics; Reservoirs; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613697

Filename

613697