Pressure sensor for micro chemical system on a chip

A novel pressure sensor, ideal for use in a micro chemical system on a chip, was developed. Key specifications of pressure sensors for micro chemical systems are as follows: embedded miniaturized structure; high chemical resistance; no interference with the microflow during the measurement. However, a pressure sensor with such characteristics has not been commercially available. Our pressure sensor element was a 1 mm cube and could be embedded anywhere in a glass microchip. Dead-volumeless installation of the sensor was possible, and disturbance of the liquid flow in the microchannel could be minimized by that. In addition, the diaphragm of the sensor was coated with polycrystalline SiC, and it was highly tolerant to corrosive chemicals. In this paper, the fabrication process of the new pressure sensor and its preliminary test results are discussed.