Novel microstructures and technologies applied in chemical analysis techniques

Author

Spiering, Vincent L. ; Van der Moolen, Johannes N. ; Burger, Gert-Jan ; van den Berg, Albert

Author_Institution

Twente MicroProducts, Enschede, Netherlands

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

511

Abstract

Novel glass and silicon microstructures and their application in chemical analysis are presented. The micro technologies comprise (deep) dry etching, thin layer growth and anodic bonding. With this combination it is possible to create high resolution electrically isolating silicon dioxide structures with aspect ratio´s similar to those possible in silicon. Main applications are chemical separation methods such as high performance liquid chromatography (HPLC) or electrophoresis (HPCE). Beside these channel structures, a capillary connector with very low dead and mixing volume has been designed and fabricated for use in (correlation) electrophoresis, and tested by means of precision of consecutive single injections

Keywords

capillarity; chromatography; electrochemical analysis; electrophoresis; etching; glass; isolation technology; micromachining; microsensors; separation; silicon; wafer bonding; Black Silicon Method; Si; Si microstructures; anodic bonding; aspect ratio; capillary connector; channel structures; chemical analysis techniques; chemical separation methods; consecutive single injections; correlation electrophoresis; deep dry etching; glass microstructures; high performance capillary electrophoresis; high performance liquid chromatography; high resolution electrically isolating structures; microchannels; precision; pyrex wafer; thin layer growth; very low dead/mixing volume; Bonding; Chemical analysis; Chemical technology; Connectors; Dry etching; Electrokinetics; Glass; Isolation technology; Microstructure; Silicon compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613699

Filename

613699