• DocumentCode
    3120434
  • Title

    Unobtrusive packaging of optoelectronic devices for optical tactile and shear sensors

  • Author

    Bosman, Erwin ; Van Hoe, Bram ; Missinne, Jeroen ; Van Steenberge, Geert ; Kalathimekkad, Sandeep ; Van Daele, Peter

  • Author_Institution
    Center for Microsyst. Technol. (CMST), Ghent Univ., Ghent, Belgium
  • fYear
    2011
  • fDate
    Nov. 28 2011-Dec. 1 2011
  • Firstpage
    504
  • Lastpage
    509
  • Abstract
    This paper presents the development of two new types of optical sensors that can measure both pressure and shear stresses in an unobtrusive way. Standard packaging technologies for optoelectronic components result in very bulky and rigid sensors. We present an optoelectronic package which is flexible, only 40 μm thick and which can be bent down to a bending radius of 2 mm. This advanced packaging technique enables the flexibility and compactness of the sensors, which are needed to be unobtrusive. The resulting pressure and shear sensors are discussed, characterized and demonstrated.
  • Keywords
    optical sensors; optoelectronic devices; packaging; pressure sensors; tactile sensors; advanced packaging technique; optical shear stress sensor; optical tactile sensor; optoelectronic component; optoelectronic device; optoelectronic package; pressure sensor; standard packaging technology; unobtrusive packaging; Optical sensors; Optical variables measurement; Photodiodes; Sensor phenomena and characterization; Transducers; Vertical cavity surface emitting lasers; VCSEL; flexible; packaging; sensor; shear;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensing Technology (ICST), 2011 Fifth International Conference on
  • Conference_Location
    Palmerston North
  • ISSN
    2156-8065
  • Print_ISBN
    978-1-4577-0168-9
  • Type

    conf

  • DOI
    10.1109/ICSensT.2011.6137031
  • Filename
    6137031