DocumentCode
3120434
Title
Unobtrusive packaging of optoelectronic devices for optical tactile and shear sensors
Author
Bosman, Erwin ; Van Hoe, Bram ; Missinne, Jeroen ; Van Steenberge, Geert ; Kalathimekkad, Sandeep ; Van Daele, Peter
Author_Institution
Center for Microsyst. Technol. (CMST), Ghent Univ., Ghent, Belgium
fYear
2011
fDate
Nov. 28 2011-Dec. 1 2011
Firstpage
504
Lastpage
509
Abstract
This paper presents the development of two new types of optical sensors that can measure both pressure and shear stresses in an unobtrusive way. Standard packaging technologies for optoelectronic components result in very bulky and rigid sensors. We present an optoelectronic package which is flexible, only 40 μm thick and which can be bent down to a bending radius of 2 mm. This advanced packaging technique enables the flexibility and compactness of the sensors, which are needed to be unobtrusive. The resulting pressure and shear sensors are discussed, characterized and demonstrated.
Keywords
optical sensors; optoelectronic devices; packaging; pressure sensors; tactile sensors; advanced packaging technique; optical shear stress sensor; optical tactile sensor; optoelectronic component; optoelectronic device; optoelectronic package; pressure sensor; standard packaging technology; unobtrusive packaging; Optical sensors; Optical variables measurement; Photodiodes; Sensor phenomena and characterization; Transducers; Vertical cavity surface emitting lasers; VCSEL; flexible; packaging; sensor; shear;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensing Technology (ICST), 2011 Fifth International Conference on
Conference_Location
Palmerston North
ISSN
2156-8065
Print_ISBN
978-1-4577-0168-9
Type
conf
DOI
10.1109/ICSensT.2011.6137031
Filename
6137031
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