Enabling robustness and flexibility of equipment data collection through SEMI EDA standards

This paper addresses data collection mechanisms for factory automation systems. The two-fold purpose of this paper includes describing some of the key benefits of the Equipment Data Acquisition (EDA) interface being defined by SEMI and addressing challenges associated with migration to this interface. Before reviewing and addressing the contents of the emerging EDA standard we will detail problems, issues and deficiencies associated with the current data collection mechanism that we´ve experienced in Intel manufacturing automation systems. These problems can be attributed to either lack of robustness or insufficient flexibility. Then, we proceed by summarizing the contents, and benefits of the emerging EDA standard.