Title :
Improved process monitoring with Independent Components
Author :
Shannon, Thaddeus T. ; Abercrombie, David ; McNames, James ; Whitefield, Bruce
Author_Institution :
Syst. Sci. Program, Portland State Univ., OR, USA
Abstract :
We propose a method for process monitoring of a semiconductor manufacturing process. Independent Component Analysis (ICA) is applied to characterize E-test parameter data. We calculate angular confidence intervals for the model, eliminate marginally significant components, and implement control charts for significant components of interest. Alarms are generated off of deviations in the charted components. Alarms are easily used in process diagnosis based on the interpretation of the independent components.
Keywords :
control charts; independent component analysis; integrated circuit manufacture; manufacturing processes; process monitoring; semiconductor technology; statistical process control; E test parameter data; control charts; independent component analysis; process diagnosis; process monitoring; semiconductor manufacturing process; statistical process control; Fault diagnosis; Independent component analysis; Large scale integration; Manufacturing processes; Microelectronics; Monitoring; Principal component analysis; Process control; Semiconductor device manufacture; Testing;
Conference_Titel :
Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop
Print_ISBN :
0-7803-8312-5
DOI :
10.1109/ASMC.2004.1309559
