Title :
Fabrication of periodically poled domains transducers on LiNbO3
Author :
Courjon, E. ; Bodin, N. ; Lengaigne, G. ; Gauthier-Manuel, L. ; Daniau, W. ; Ballandras, S. ; Paruch, P. ; Triscone, J.M. ; Hauden, J.
Author_Institution :
UMR CNRS, Besancon
Abstract :
The development of piezoelectric transducers based on periodically poled ferroelectrics domains is investigated. Optical quality Z-cut LiNbO3 wafers have been used for the fabrication of test devices operating in the range 7-70 MHz. The fabrication process is detailed and characterization results are reported. A very good agreement between theoretical predictions achieved by periodic finite element analysis and experiments is observed, allowing for a precise identification of the excited modes
Keywords :
VHF devices; ferroelectric devices; ferroelectric thin films; finite element analysis; interdigital transducers; lithium compounds; 7 to 70 MHz; LiNbO3; optical quality Z-cut wafers; periodic finite element analysis; periodically poled ferroelectrics domains; piezoelectric transducers; test devices fabrication; Admittance; Ferroelectric materials; Finite element methods; Frequency; Optical device fabrication; Optical variables control; Piezoelectric transducers; Signal analysis; Testing; Ultrafast optics;
Conference_Titel :
International Frequency Control Symposium and Exposition, 2006 IEEE
Conference_Location :
Miami, FL
Print_ISBN :
1-4244-0074-0
Electronic_ISBN :
1-4244-0074-0
DOI :
10.1109/FREQ.2006.275497
