A silicon micromachined six-degree of freedom piezoresistive accelerometer

Author

Amarasinghe, Ranjith ; Dao, Dzung Viet ; Toriyama, Toshiyuki ; Sugiyama, Susumu

Author_Institution

Dept. of Micro Syst. Technol., Ritsumeikan Univ., Kyoto, Japan

fYear

2004

fDate

24-27 Oct. 2004

Firstpage

852

Abstract

This paper presents a miniaturized piezoresistive six-degree of freedom (6DOF) accelerometer utilizing a highly symmetric quad-beam structure with symmetrically bonded identical two seismic masses. The FEM simulations of static and modal analysis were performed to optimize structural parameters and analyze the mechanical response at accelerations of different directions. The accelerometer is capable of measuring three components of linear acceleration and three components of angular acceleration on three orthogonal axes up to ±10 g in the frequency bandwidth of 300 Hz. Comparison of the obtained experimental results and finite element simulation shows good agreement. The sensor is ideal for use in biomechanical research applications such as study of human gesture recognition systems.

Keywords

accelerometers; biomechanics; finite element analysis; gesture recognition; microsensors; modal analysis; piezoresistive devices; silicon; 6DOF; FEM simulations; angular acceleration; biomechanical research; human gesture recognition systems; linear acceleration; mechanical response; modal analysis; seismic masses; silicon micromachined piezoresistive accelerometer; six-degree of freedom accelerometer; static analysis; symmetric quad-beam structure; Acceleration; Accelerometers; Analytical models; Bonding; Frequency measurement; Modal analysis; Performance analysis; Piezoresistance; Silicon; Structural engineering;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2004. Proceedings of IEEE

Print_ISBN

0-7803-8692-2

Type

conf

DOI

10.1109/ICSENS.2004.1426304

Filename

1426304