Design and fabrication of breakover diode with improved parameter control

In this work, a novel breakover diode (BOD) design has been proposed and developed allowing the generation of a range of triggering voltages (20-300 V) independent of the starting material´s resistivity, through modification of a single process step. Moreover, absolute control over the triggering (forward blocking) voltage (V_BF) has been improved to approximately ±1.5%. In addition, the dependence of other critical device parameters, such as the breakover voltage (V_BO), breakover current (I_BO) and holding current (I_h), on the forward blocking voltage has been virtually eliminated