Title :
BAW microwave temperature sensor
Author :
Mansfeld, G.D. ; Alekseev, S.G. ; Kotelyansky, I.M. ; Kirillov, A.G. ; Veretin, V.S.
Author_Institution :
1st-3rd Inst. of Radioengineering & Electron., RAS, Russia
Abstract :
The paper studies the possibility of using microwave high overtone bulk acoustic wave resonators (HBAR) in temperature sensors in liquids. The shear 430 MHz BAW are excited in the resonator structure providing high temperature sensitivity and relatively low harmful mechanical sensitivity of sensor on ambient liquid media. The new technical suggestion is that the resonator is acoustically isolated and protected from the mechanical influence of ambient media by multilayer Bragg quarter-wavelength thin film reflectors.
Keywords :
acoustic resonators; bulk acoustic wave devices; liquids; microwave devices; sensitivity; temperature sensors; thin films; 430 MHz; BAW microwave temperature sensor; Bragg quarter-wavelength reflectors; acoustic isolation; liquids; mechanical sensitivity; microwave high overtone bulk acoustic wave resonators; multilayer thin film reflectors; shear BAW; temperature sensitivity; temperature sensors; Acoustic sensors; Electrodes; Electromagnetic measurements; Mechanical sensors; Nonhomogeneous media; Protection; Resonant frequency; Substrates; Temperature sensors; Thin film sensors;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426310
