DocumentCode
3121732
Title
A measuring circuit for MEMS resonant accelerometer
Author
Xu, Pei ; Liu, Jun ; Zhang, Wendong
Author_Institution
Minist. Educ. Key Lab on Instrum. Sci. & Dynamic Meas., North China Inst. of Technol., Taiyuan, China
fYear
2004
fDate
24-27 Oct. 2004
Firstpage
896
Abstract
The MEMS accelerometer has characteristics of high precision, small volume, low cost and is easy to be integrated. It has received attention from many people. Focused on the measurement of MEMS resonant accelerometer signals, the article introduces a new method of measuring weak signals, and designs a relative difference frequency measurement circuit. The circuit is simple in design, and proved to be easily integrated and has a good precision and anti-disturbance capability.
Keywords
accelerometers; integrated circuit design; microsensors; signal processing; MEMS accelerometer; MEMS resonant accelerometer; anti-disturbance capability; cost; measuring circuit; precision; relative difference frequency measurement circuit; volume; weak signals; Acceleration; Accelerometers; Capacitance; Costs; Electromagnetic measurements; Frequency measurement; Integrated circuit measurements; Micromechanical devices; RLC circuits; Resonance;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2004. Proceedings of IEEE
Print_ISBN
0-7803-8692-2
Type
conf
DOI
10.1109/ICSENS.2004.1426315
Filename
1426315
Link To Document