Title :
Novel mesoporous filters for selective gas absorption
Author :
Baumbach, Marc ; Schütze, Andreas ; Cheng, Fei ; Kelly, Steven ; Delprat, Hervé ; Parret, Frederic ; Menini, Philippe ; Soulantica, Katerina ; Chaudret, Bruno ; Maisonnat, André
Author_Institution :
Lab. for Meas. Technol., Saarlandes Univ., Saarbrucken, Germany
Abstract :
Semiconductor gas sensors have a proven potential for low cost and highly sensitive gas detection. However, selectivity remains one of the main problems for many applications. We report a new kind of mesoporous ceramic filter with nanoscale pores. The ceramic filter offers mechanical protection and can help to boost selectivity enormously through selective gas absorption. The developed nano-technological filters are based on mesoporous secondary and ternary silicon nitride derivatives with a defined particle size and are prepared via a new sol gel route. The interaction of the filters with CO, NO2, H2 and propane were evaluated using broadband sensors. Highly selective absorption was observed for different gases, especially NO2. From these experiments a filter efficiency value is calculated, which allows easy selection of suitable filter materials for different applications.
Keywords :
carbon compounds; filtration; gas sensors; hydrogen; nanoporous materials; nanotechnology; nitrogen compounds; silicon compounds; sorption; CO; H2; NO2; Si3N4; carbon monoxide; filter efficiency value; hydrogen; mesoporous ceramic filter; mesoporous filters; nano-technological filters; nanoscale pores; nitrogen dioxide; selective gas absorption; selectivity; semiconductor gas sensors; silicon nitride derivatives; sol-gel procedure; Absorption; Ceramics; Composite materials; Costs; Energy consumption; Filters; Gas detectors; Mesoporous materials; Silicon; Testing;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426326