• DocumentCode
    3122034
  • Title

    Vibrating capacitor: applications in the research of semiconductor gas sensors

  • Author

    Mizsei, Janos

  • Author_Institution
    Dept. of Electron Devices, Budapest Univ. of Technol. & Econ., Hungary
  • fYear
    2004
  • fDate
    24-27 Oct. 2004
  • Firstpage
    947
  • Abstract
    Adsorption usually results in work function shifts on catalytically active surfaces such as semiconductor gas sensors. That is why the vibrating capacitor method is such a valuable tool for investigating gas sensor materials. The article summarises the capabilities of the vibrating capacitor from the simplest, adsorption induced work-function tests to the scanning vibrating capacitor yielded olfactory pictures and chemical pictures. After the brief summary, the latest results are discussed in detail, such as olfactory pictures from semiconductor surfaces, chemical pictures from thin SnO2 layer produced by atomic layer epitaxy, and chemical pictures from Pd nanolayer (activator) covered surfaces.
  • Keywords
    adsorption; atomic layer epitaxial growth; gas sensors; semiconductor devices; work function; Pd; SnO2; adsorption; atomic layer epitaxy; catalytically active surfaces; chemical pictures; olfactory pictures; palladium activator covered surfaces; palladium nanolayer covered surfaces; semiconductor gas sensors; semiconductor surfaces; thin tin dioxide layer; vibrating capacitor method; work function shifts; Capacitors; Chemicals; Current measurement; Electric variables measurement; Electrodes; Gas detectors; Olfactory; Semiconductor materials; Vibration measurement; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2004. Proceedings of IEEE
  • Print_ISBN
    0-7803-8692-2
  • Type

    conf

  • DOI
    10.1109/ICSENS.2004.1426328
  • Filename
    1426328