Title :
Challenges and opportunities in multi-sensing microsystems - a case study
Author :
Gianchandani, Yogesh B.
Author_Institution :
Eng. Res. Center for Wireless Integrated MicroSystems, Michigan Univ., Ann Arbor, MI, USA
Abstract :
Microsensor arrays deployed in distributed networks are expected to revolutionize fields ranging from medical instrumentation for neural interfaces to environmental monitoring for industrial effluents, weather, and homeland security. This paper reports on an effort to develop a generic multi-sensor environmental monitoring platform which has stimulated substantial research at all levels, ranging from materials, fabrication methods and packaging, to sensor, actuator, circuit, and system design.
Keywords :
distributed sensors; environmental factors; microactuators; microsensors; network synthesis; packaging; actuator; circuit design; distributed networks; fabrication methods; materials; microsensor arrays; multi-sensing microsystems; multi-sensor environmental monitoring platform; packaging; system design; Actuators; Biomedical monitoring; Circuits; Effluents; Fabrication; Instruments; Microsensors; Packaging; Sensor systems; Terrorism;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426337
