DocumentCode :
3122962
Title :
Growth and characterization of Nb films and Nb/Al-AlOx/Nb trilayers for Josephson junctions
Author :
Xinjie Kang ; Liliang Ying ; Guofeng Zhang ; Huiwu Wang ; Xiangyan Kong ; Wei Peng ; Xiaoming Xie
Author_Institution :
State Key Lab. of Functional Mater. for Inf., Shanghai Inst. of Microsyst. & Inf. Technol. (SIMIT), Shanghai, China
fYear :
2013
fDate :
7-11 July 2013
Firstpage :
1
Lastpage :
3
Abstract :
We study the influences of substrates on structure and microstructure characteristics of Nb films deposited onto Si (100), SiO2/Si (100), MgO (100) and C-plane sapphire (Al2O3) by use of magnetron sputtering. Atomic force microscopy shows that elongated columnar shaped grains dominate on these substrates. X-ray diffraction patterns indicate (110)-oriented growth on Si, SiO2/Si and sapphire substrates, while textured growth occurs on MgO substrate. An amorphous oxide layer about 2 nm on the surface of Nb films is confirmed by X-ray reflectometry and transmission electron microscopy analysis. Subsequently, Nb/Al-AlOx/Nb trilayers on Si substrates are fabricated and the interfacial microstructures are also investigated.
Keywords :
Josephson effect; X-ray diffraction; aluminium compounds; atomic force microscopy; crystal microstructure; elemental semiconductors; magnesium compounds; multilayers; niobium; sapphire; silicon; silicon compounds; sputter deposition; sputtered coatings; substrates; superconducting materials; superconducting thin films; Al-AlOX-Nb; Al2O3; C-plane sapphire; Josephson junctions; MgO; MgO substrate; Nb films; Nb-AlOX-Nb; SiO2-Si; X-ray diffraction patterns; X-ray reflectometry; atomic force microscopy; deposition; elongated columnar shaped grains; film growth; interfacial microstructures; magnetron sputtering; microstructure characteristics; sapphire substrates; transmission electron microscopy analysis; trilayers; Films; Microstructure; Niobium; Silicon; Sputtering; Substrates; Surface morphology; Nb films; Nb/Al-AlOx/Nb trilayers; magnetron sputtering; microstructure;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Superconductive Electronics Conference (ISEC), 2013 IEEE 14th International
Conference_Location :
Cambridge, MA
Print_ISBN :
978-1-4673-6369-3
Type :
conf
DOI :
10.1109/ISEC.2013.6604315
Filename :
6604315
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3122962
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