• DocumentCode
    3122962
  • Title

    Growth and characterization of Nb films and Nb/Al-AlOx/Nb trilayers for Josephson junctions

  • Author

    Xinjie Kang ; Liliang Ying ; Guofeng Zhang ; Huiwu Wang ; Xiangyan Kong ; Wei Peng ; Xiaoming Xie

  • Author_Institution
    State Key Lab. of Functional Mater. for Inf., Shanghai Inst. of Microsyst. & Inf. Technol. (SIMIT), Shanghai, China
  • fYear
    2013
  • fDate
    7-11 July 2013
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We study the influences of substrates on structure and microstructure characteristics of Nb films deposited onto Si (100), SiO2/Si (100), MgO (100) and C-plane sapphire (Al2O3) by use of magnetron sputtering. Atomic force microscopy shows that elongated columnar shaped grains dominate on these substrates. X-ray diffraction patterns indicate (110)-oriented growth on Si, SiO2/Si and sapphire substrates, while textured growth occurs on MgO substrate. An amorphous oxide layer about 2 nm on the surface of Nb films is confirmed by X-ray reflectometry and transmission electron microscopy analysis. Subsequently, Nb/Al-AlOx/Nb trilayers on Si substrates are fabricated and the interfacial microstructures are also investigated.
  • Keywords
    Josephson effect; X-ray diffraction; aluminium compounds; atomic force microscopy; crystal microstructure; elemental semiconductors; magnesium compounds; multilayers; niobium; sapphire; silicon; silicon compounds; sputter deposition; sputtered coatings; substrates; superconducting materials; superconducting thin films; Al-AlOX-Nb; Al2O3; C-plane sapphire; Josephson junctions; MgO; MgO substrate; Nb films; Nb-AlOX-Nb; SiO2-Si; X-ray diffraction patterns; X-ray reflectometry; atomic force microscopy; deposition; elongated columnar shaped grains; film growth; interfacial microstructures; magnetron sputtering; microstructure characteristics; sapphire substrates; transmission electron microscopy analysis; trilayers; Films; Microstructure; Niobium; Silicon; Sputtering; Substrates; Surface morphology; Nb films; Nb/Al-AlOx/Nb trilayers; magnetron sputtering; microstructure;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Superconductive Electronics Conference (ISEC), 2013 IEEE 14th International
  • Conference_Location
    Cambridge, MA
  • Print_ISBN
    978-1-4673-6369-3
  • Type

    conf

  • DOI
    10.1109/ISEC.2013.6604315
  • Filename
    6604315
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3122962