Characterization of multi- and single-layer structure SAW sensor [gas sensor]

Author

Ahmadi, S. ; Hassani, F. ; Korman, C. ; Rahaman, M. ; Zaghloul, M.

Author_Institution

Dept. of Electr. & Comput. Eng., George Washington Univ., DC, USA

fYear

2004

fDate

24-27 Oct. 2004

Firstpage

1129

Abstract

The design of CMOS compatible thin ZnO film base, and LiNbO₃ wafer base, surface acoustics wave (SAW) gas sensors, that are highly selective and sensitive, is described. Furthermore, design and post-CMOS processing fabrication steps that utilises micro-electro-mechanical systems (MEMS) techniques to implement the SAW gas sensor are presented. The Rayleigh wave velocity for various ZnO film thicknesses is simulated and results are presented. The velocity calculation is based on a computer simulation of a multilayer (ZnO/SiO₂/Si) structure that uses wave equations. Simulation results and experimental measurements of SAW sensors with a single layer bulk LiNbO₃ wafer are shown, and compared. Moreover, results of experimentation and simulation of wave velocity for a yz-cut LiNbO₃ wafer are shown.

Keywords

Rayleigh waves; delay lines; gas sensors; interdigital transducers; lithium compounds; microsensors; surface acoustic wave sensors; wave equations; zinc compounds; CMOS compatible film base; CMOS compatible wafer base; IDT; LiNbO₃; MEMS techniques; Rayleigh wave velocity; SAW delay line sensors; ZnO-SiO₂-Si; interdigital transducer; multilayer sensors; surface acoustics wave gas sensors; wave equations; yz-cut wafer; Acoustic sensors; Acoustic waves; Computational modeling; Fabrication; Gas detectors; Microelectromechanical systems; Process design; Sensor phenomena and characterization; Surface acoustic waves; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2004. Proceedings of IEEE

Print_ISBN

0-7803-8692-2

Type

conf

DOI

10.1109/ICSENS.2004.1426375

Filename

1426375