Title :
Scanning nano-calorimeter
Author :
Weiß, T. ; Moser, I. ; Igel, G. ; Urban, G.A.
Author_Institution :
IMTEK, Freiburg Univ., Germany
Abstract :
Current micro-calorimetry equipment requires large sample volumes. To overcome this limitations, a highly sensitive nano-calorimeter with reduced sample volume and decreased response time was developed (Winter, W. and Hohne, G.W.H., Thermochimica Acta, vol.403, p.43-53, 2003; Eframov, M. Yu et al., Thermochimica Acta, vol.412, p.13-23, 2004). Sensitivity is evinced by detection of phase transitions in liquid crystals, solutions of a phospholipid and solutions of the enzyme Glucoseoxidase. The nano-calorimeter is made of a cavity in an anisotropically etched silicon chip with a volume of about 100 nl to take in the liquid or gel-like sample. A membrane of Si3N4 of 1 μm thickness forms the bottom closure of the cavity. Amorphous germanium thermistors with a temperature sensitivity of 100 μK are placed onto the Si3N4 membrane and the silicon chip as well. This allows thermal flow measurements with power resolution of down to 1 nW and specific thermal capacity resolution down to 1 mJ/g. This high sensitivity of the nano-calorimeter allows the detection of denaturing temperatures of enzymes within hydrogel membranes.
Keywords :
calorimeters; calorimetry; enzymes; germanium; liquid crystals; membranes; nanotechnology; phase transformations; semiconductor devices; sensitivity; silicon; silicon compounds; temperature; thermistors; 1 micron; 100 muK; Ge; Glucoseoxidase solutions; Si; Si3N4; amorphous germanium thermistors; anisotropically etched silicon chip; denaturing temperature detection; enzyme solutions; enzymes; gel-like sample; hydrogel membranes; liquid crystals; liquid sample; micro-calorimetry; phase transitions; phospholipid solutions; power resolution; response time; scanning nano-calorimeter; silicon nitride membrane; specific thermal capacity resolution; temperature sensitivity; thermal flow measurements; Amorphous materials; Anisotropic magnetoresistance; Biochemistry; Biomembranes; Delay; Etching; Liquid crystals; Phase detection; Silicon; Temperature sensors;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426379