DocumentCode
3124099
Title
SOI charging prevention: chip-level net tracing and diode protection
Author
Hook, Terence B. ; Bonges, Henry ; Harmon, David ; Lai, Wing
Author_Institution
IBM Microeletronics, Essex Junction, VT, USA
fYear
2004
fDate
2004
Firstpage
127
Lastpage
130
Abstract
In this paper we show that the SOI FET is conductive during processing, and also that a FET shunted across the gate and source/drain of another transistor does in fact protect that device against charging damage.
Keywords
MOSFET; Weibull distribution; semiconductor device breakdown; silicon-on-insulator; surface charging; SOI FET; SOI charging prevention; TDDB; Weibull plot; charging damage; chip-level net tracing; conductive behaviour; diode protection; second-metal area; Appropriate technology; Chip scale packaging; Circuits; Conductors; Diodes; FETs; Metallization; Microelectronics; Protection; Wiring;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Circuit Design and Technology, 2004. ICICDT '04. International Conference on
Print_ISBN
0-7803-8528-4
Type
conf
DOI
10.1109/ICICDT.2004.1309926
Filename
1309926
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