Planar High-Q Microresonators for Chip-Scale Integrated Silicon Photonics

Author

Soltani, Mohammad ; Yegnanarayanan, Siva ; Adibi, Ali

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA

fYear

2006

fDate

Oct. 2006

Firstpage

42

Lastpage

43

Abstract

In this paper we present fabrication and characterization of high Q microdisk resonators on a silicon-on-insulator (SOI) platform. We also present the planar integration of the input/output coupling waveguides with the microdisk resonator. The effect of substrate leakage loss is evaluated by comparing the performance of resonator-on-substrate versus undercut type resonators. Detailed measurements of Q and nonlinear response using lock-in technique with amplitude and phase response for both resonator structures is presented

Keywords

micro-optomechanical devices; micromechanical resonators; optical couplers; optical fabrication; optical planar waveguides; optical resonators; silicon-on-insulator; SOI; Si-SiO₂; amplitude response; chip-scale integrated silicon photonics; input-output coupling waveguides; lock-in technique; microdisk resonators; nonlinear response; phase response; planar high-Q microresonators; planar integration; resonator characterization; resonator fabrication; resonator structures; silicon-on-insulator platform; substrate leakage loss effect; CMOS technology; Couplings; Fabrication; Microcavities; Optical resonators; Optical sensors; Optical waveguides; Photonics; Resonance; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE

Conference_Location

Montreal, Que.

Print_ISBN

0-7803-9555-7

Electronic_ISBN

0-7803-9555-7

Type

conf

DOI

10.1109/LEOS.2006.278809

Filename

4054046