• DocumentCode
    3124494
  • Title

    Mesostructured and mesoporous metal oxide films for optical waveguide-based gas sensor application

  • Author

    Qi, Zhi-Mei ; Zhou, Hao-Shen ; Honma, Itaru

  • Author_Institution
    Energy Electron. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba, Japan
  • fYear
    2004
  • fDate
    24-27 Oct. 2004
  • Firstpage
    1316
  • Abstract
    A glass planar optical waveguide with a top layer of mesostructured or mesoporous metal oxide films, such as TiO2, SnO2, ZnO2, ZrO2, WO3, Al2O3, Ta2O5 or Nb2O5, was proposed for chemical, biological and gas sensor applications. To demonstrate the application feasibility of such a composite waveguide structure, a slide glass substrate with a tin-diffused layer was dip-coated with a mesostructured hybrid film of peroxopolytungstic acid and block copolymer template. On the basis of the polarimetric interference, the resulting waveguide has been demonstrated to have a high sensitivity to ammonia in air at room temperature.
  • Keywords
    ammonia; gas sensors; light interference; optical glass; optical planar waveguides; optical sensors; polymer films; porous materials; NH3; Sn; ammonia; biological sensor; block copolymer template; chemical sensor; glass planar optical waveguide; mesoporous metal oxide films; mesostructured hybrid film; mesostructured metal oxide films; optical sensors; optical waveguide-based gas sensor; peroxopolytungstic acid; polarimetric interference; slide glass substrate; tin-diffused layer; Biomedical optical imaging; Gas detectors; Glass; Mesoporous materials; Optical films; Optical planar waveguides; Optical sensors; Optical waveguides; Planar waveguides; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2004. Proceedings of IEEE
  • Print_ISBN
    0-7803-8692-2
  • Type

    conf

  • DOI
    10.1109/ICSENS.2004.1426424
  • Filename
    1426424