Title :
Mesostructured and mesoporous metal oxide films for optical waveguide-based gas sensor application
Author :
Qi, Zhi-Mei ; Zhou, Hao-Shen ; Honma, Itaru
Author_Institution :
Energy Electron. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba, Japan
Abstract :
A glass planar optical waveguide with a top layer of mesostructured or mesoporous metal oxide films, such as TiO2, SnO2, ZnO2, ZrO2, WO3, Al2O3, Ta2O5 or Nb2O5, was proposed for chemical, biological and gas sensor applications. To demonstrate the application feasibility of such a composite waveguide structure, a slide glass substrate with a tin-diffused layer was dip-coated with a mesostructured hybrid film of peroxopolytungstic acid and block copolymer template. On the basis of the polarimetric interference, the resulting waveguide has been demonstrated to have a high sensitivity to ammonia in air at room temperature.
Keywords :
ammonia; gas sensors; light interference; optical glass; optical planar waveguides; optical sensors; polymer films; porous materials; NH3; Sn; ammonia; biological sensor; block copolymer template; chemical sensor; glass planar optical waveguide; mesoporous metal oxide films; mesostructured hybrid film; mesostructured metal oxide films; optical sensors; optical waveguide-based gas sensor; peroxopolytungstic acid; polarimetric interference; slide glass substrate; tin-diffused layer; Biomedical optical imaging; Gas detectors; Glass; Mesoporous materials; Optical films; Optical planar waveguides; Optical sensors; Optical waveguides; Planar waveguides; Zinc oxide;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426424