Title :
Mechanical properties of LIGA-deposited nickel for MEMS transducers
Author :
Sharpe, William N., Jr. ; LaVan, David A. ; Edwards, Richard L.
Author_Institution :
Dept. of Mech. Eng., Johns Hopkins Univ., Baltimore, MD, USA
Abstract :
This paper presents a new technique for measuring the stress-strain curve of nickel produced by the LIGA method. The results of nine tests on 200 μm thick specimens produced on the 3rd LIGAMUMPS run show a Young´s modulus similar to that of pure nickel, but strengths that are considerably higher
Keywords :
Young´s modulus; elastic moduli measurement; mechanical variables measurement; microsensors; nickel; stress-strain relations; tensile strength; tensile testing; yield strength; 200 mum; LIGA-deposited Ni; LIGAMUMPS; MEMS transducers; Ni; Young´s modulus; dog biscuit shaped specimens; mechanical properties; stress-strain curve measurement; tests; ultimate strength; yield strength; Mechanical factors; Mechanical variables measurement; Micromachining; Micromechanical devices; Nickel; Strain measurement; Stress measurement; Testing; Transducers; Vibration measurement;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613724
