Fast filtering technique for HREM image analysis

Author

Guedj, C. ; Vasiliu, M.C.

Author_Institution

Alcatel Alsthom Recherche, Marcoussis, France

Volume

2

fYear

1997

fDate

2-4 July 1997

Firstpage

547

Abstract

An original method for filtering high resolution transmission electron microscopy images is proposed. An original 2D convolution is applied. It removes parasitic noise and long range contrast fluctuations, and allows local intensity renormalisation in one single pass. Examples are given for a HREM micrograph of a Si_0.775Ge _0.1C_0.125 layer epitaxially grown on Si(001) and synthetic images. This filtering method is compared with conventional FFT filtering methods. Our technique is more precise, faster and independent on image rotation

Keywords

Ge-Si alloys; convolution; image resolution; interference suppression; physics computing; semiconductor epitaxial layers; semiconductor materials; transmission electron microscopy; two-dimensional digital filters; 2D convolution; HREM image analysis; HREM micrograph; Si; Si/sub 0.775/Ge/sub 0.1/C/sub 0.125/ layer; SiGeC; fast filtering technique; high resolution transmission electron microscopy images; image rotation; local intensity renormalisation; long range contrast fluctuations; parasitic noise; Atomic measurements; Convolution; Crystallization; Diffraction; Electrons; Filtering; Fluctuations; Fourier transforms; Image analysis; Kernel;

fLanguage

English

Publisher

ieee

Conference_Titel

Digital Signal Processing Proceedings, 1997. DSP 97., 1997 13th International Conference on

Conference_Location

Santorini, Greece

Print_ISBN

0-7803-4137-6

Type

conf

DOI

10.1109/ICDSP.1997.628407

Filename

628407