Title :
The integration of SnO2 thin-film onto micro-hotplate for gas sensor applications
Author :
Sheng, Lie-yi ; Chan, Philip C.H. ; Sin, Johny K O
Author_Institution :
Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., Hong Kong
Abstract :
Anisotropic silicon etching techniques have been widely used in various microsensors to create thermally isolated structures or micro-hotplate (MHP). EDP (Ethylene-diamine-pyrocatechol) is one of the most commonly used anisotropic etchants because of its high selectivity of silicon compared to masking materials such as silicon dioxide. To integrate sensor arrays of various types of SnO2 thin-film sensors on the microstructure, we need to find a way to photolithographically pattern the SnO2 thin-film. In this paper we report results from such experiments
Keywords :
etching; gas sensors; microsensors; photolithography; semiconductor thin films; tin compounds; EDP; SnO2; SnO2 thin film; anisotropic etching; ethylene-diamine-pyrocatechol; gas sensor; micro-hotplate; microsensor; photolithography; Anisotropic magnetoresistance; Etching; Fabrication; Gas detectors; Microsensors; Microstructure; Resists; Sensor arrays; Silicon; Silicon compounds; Sputtering; Thin film sensors; Transistors;
Conference_Titel :
Electron Devices Meeting, 1997. Proceedings., 1997 IEEE Hong Kong
Print_ISBN :
0-7803-3802-2
DOI :
10.1109/HKEDM.1997.642352
