Title :
Design and test of deep-UV position sensitive detectors
Author :
Mazzeo, G. ; Salvatori, S. ; Ralchenko, V. ; Conte, G.
Author_Institution :
Dept. of Electron. Eng., Univ. Roma Tre, Rome, Italy
Abstract :
A position sensitive detector (PSD) for UV light has been realized on a high quality diamond substrate. The layouts of the contact structure and of the interfacing circuitry have been optimised to allow the use under excimer laser light. The simplicity of the structure mainly overcomes all the limitations of the diamond technology, but also guarantees high reliability of the detector. The linearity of the sensor transcharacteristic and the dependency of the output signal on the beam intensity and size were studied.
Keywords :
diamond; excimer lasers; position sensitive particle detectors; ultraviolet detectors; UV light; beam intensity; deep-UV detectors; diamond substrate; excimer laser light; position sensitive detectors; sensor transcharacteristic linearity; Circuits; Electrodes; Light sources; Optical device fabrication; Physics; Position sensitive particle detectors; Semiconductor lasers; Strips; Testing; Voltage;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426486
