Title :
Nonlinear model reduction for simulation and control of rapid thermal processing
Author :
Aling, Henk ; Banerjee, Suman ; Bangia, Anil K. ; Cole, Vernon ; Ebert, Jon ; Emami-Naeini, Abbas ; Jensen, Klavs F. ; Kevrekidis, Ioannis G. ; Shvartsman, Stanislav
Author_Institution :
Integrated Syst. Inc., MIT, Cambridge, MA, USA
Abstract :
A methodology (based on the proper orthogonal decomposition and approximate inertial manifolds) is proposed for obtaining low order dynamic models of rapid thermal processing (RTP) systems. These nonlinear models are designed to retain the physical understanding of the RTP system dynamics and their dependence on critical parameters, making them an attractive choice for use in developing more advanced and intelligent controllers
Keywords :
electronics industry; nonlinear control systems; process control; rapid thermal processing; reduced order systems; RTP; inertial manifolds; low-order dynamic models; nonlinear model reduction; proper orthogonal decomposition; rapid thermal processing control; simulation; Chemical engineering; Equations; Heating; Nonlinear control systems; Nonlinear dynamical systems; Rapid thermal processing; Reduced order systems; Semiconductor device modeling; Temperature; Thermal engineering;
Conference_Titel :
American Control Conference, 1997. Proceedings of the 1997
Conference_Location :
Albuquerque, NM
Print_ISBN :
0-7803-3832-4
DOI :
10.1109/ACC.1997.608956
