Title :
International Electron Devices Meeting. Technical Digest (Cat. No.02CH37358)
Abstract :
Presents the front cover, front matter, and table of contents from the conference proceedings.
Keywords :
semiconductor devices; CMOS devices; compound semiconductors; detectors; displays; electron devices; integrated circuit manufacturing; interconnect reliability; process technology; quantum electronics; sensors; simulation models; solid-state devices;
Conference_Titel :
Electron Devices Meeting, 2002. IEDM '02. International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7462-2
DOI :
10.1109/IEDM.2002.1175765
