• DocumentCode
    3127242
  • Title

    International Electron Devices Meeting. Technical Digest (Cat. No.02CH37358)

  • fYear
    2002
  • fDate
    8-11 Dec. 2002
  • Abstract
    Presents the front cover, front matter, and table of contents from the conference proceedings.
  • Keywords
    semiconductor devices; CMOS devices; compound semiconductors; detectors; displays; electron devices; integrated circuit manufacturing; interconnect reliability; process technology; quantum electronics; sensors; simulation models; solid-state devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2002. IEDM '02. International
  • Conference_Location
    San Francisco, CA, USA
  • Print_ISBN
    0-7803-7462-2
  • Type

    conf

  • DOI
    10.1109/IEDM.2002.1175765
  • Filename
    1175765