Title :
A Thermal Absolute-pressure Sensor With On-chip Digital Front-end Processor
Author :
Mastrangelo, C.H. ; Muller, R.S.
Author_Institution :
University of California
Keywords :
Circuits; Etching; Heat transfer; MOS devices; Plasma temperature; Resistors; Silicon; Thermal conductivity; Thermal sensors; Voltage;
Conference_Titel :
Solid-State Circuits Conference, 1991. Digest of Technical Papers. 38th ISSCC., 1991 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-644-6
DOI :
10.1109/ISSCC.1991.689121
