Stacked crystal filters implemented with thin films

Author

Lakin, K.M. ; Kline, G.R. ; Ketcham, R.S. ; Martin, J.T. ; McCarron, K.T.

Author_Institution

Microelectron. Res. Center, Iowa State Univ., Ames, IA, USA

fYear

1989

fDate

31 May-2 Jun 1989

Firstpage

536

Lastpage

543

Abstract

Low-insertion-loss 1-GHz stacked crystal filters have been implemented with thin films of piezoelectric AlN. Two-pole filters having insertion losses of less than 2 dB have been fabricated on Si and GaAs substrates using microelectronic processing techniques. These devices can serve as high-performance front-end filters for receivers or for other frequency-control applications. The over-moded stacked crystal shows considerable promise as a two-port 50 Ω high-Q feedback element for oscillators or for other narrowband applications

Keywords

MMIC; aluminium compounds; crystal filters; gallium arsenide; integrated circuit technology; microwave filters; piezoelectric materials; silicon; substrates; 1 GHz; 2 dB; 50 ohm; GaAs; GaAs substrates; Si; frequency-control applications; high-Q feedback element; high-performance front-end filters; insertion losses; low insertion loss; microelectronic processing techniques; oscillators; over-moded stacked crystal; piezoelectric AlN; receivers; stacked crystal filters; thin films; two pole filters; Feedback; Filters; Frequency; Gallium arsenide; Insertion loss; Microelectronics; Narrowband; Oscillators; Piezoelectric films; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control, 1989., Proceedings of the 43rd Annual Symposium on

Conference_Location

Denver, CO

Type

conf

DOI

10.1109/FREQ.1989.68914

Filename

68914