DocumentCode
3129001
Title
A stochastic state prediction in AFM based nanomanipulation
Author
Wang, Zhiyu ; Liu, Lianqing ; Wang, Zhidong ; Dong, Zaili ; Yuan, Shuai ; Hou, Jing
Author_Institution
State Key Lab. of Robot., Shenyang Inst. of Autom., Shenyang, China
fYear
2012
fDate
5-8 Aug. 2012
Firstpage
1335
Lastpage
1340
Abstract
The reliability of AFM based nanomanipulation is one of the prerequisites for nano fabricating, thus uncertainties of the target nano-particle position need to be controlled within a pointed limits, which lead to two problem to be solved: one is how to describe state uncertainties at every different sample times; the other is how to deduce the next state uncertainty according to the current one. This paper provides a method to construct a stochastic predictive model to covering those problems. In the concrete, the predictive model uses Gaussian and Beta distribution as well as Monte Carlo Method to describe and deduce the state uncertainties respectively. The method is also applied to the process of pushing a nano-particle using AFM.
Keywords
Gaussian distribution; Monte Carlo methods; atomic force microscopy; manipulators; nanofabrication; nanoparticles; position control; predictive control; stochastic systems; uncertain systems; AFM-based nanomanipulation reliability; Beta distribution; Gaussian distribution; Monte Carlo method; atomic force microscope; nanofabrication; nanoparticle pushing process; sample times; state uncertainties; stochastic state prediction; target nanoparticle position uncertainty control; Nanostructures; Predictive models; Probabilistic logic; Shape; Stochastic processes; Trajectory; Uncertainty; AFM; Beta distribution; Mont Carlo Method; Nanomanipulation; Uncertainties;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics and Automation (ICMA), 2012 International Conference on
Conference_Location
Chengdu
Print_ISBN
978-1-4673-1275-2
Type
conf
DOI
10.1109/ICMA.2012.6284330
Filename
6284330
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