Title :
Piezoelectric flow control system based on microfluidic chip
Author :
Hu, Xiaoming ; Li, Jingfang ; Li, Qin
Author_Institution :
Dept. of Biomed. Eng., Beijing Inst. of Technol., Beijing, China
Abstract :
We demonstrated an integrated piezoelectric flow control system combined with microfabrication technology and piezoelectric actuation. In this system, the microchip is made of PDMS using soft lithography and standard replica molding techniques. Incorporated with piezoelectric actuator, the device achieve the automatic flow control with low voltage varying from 10V to 30V at adjustable frequency ranging from 1 Hz to 1 kHz.
Keywords :
flow control; microfabrication; microfluidics; moulding; piezoelectric actuators; replica techniques; soft lithography; PDMS; automatic flow control; frequency 1 Hz to 1 kHz; microfabrication technology; microfluidic chip; piezoelectric actuation; piezoelectric actuator; piezoelectric flow control system; soft lithography; standard replica molding techniques; Ceramics; Electric fields; Equations; Mathematical model; Microfluidics; Sorting; Flow control; Microfluidic chips; Piezoelectric ceramic;
Conference_Titel :
Mechatronics and Automation (ICMA), 2012 International Conference on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4673-1275-2
DOI :
10.1109/ICMA.2012.6284353
