Ferromagnetic RF inductors and transformers for standard CMOS/BiCMOS

Author

Zhuang, Y. ; Vroubel, M. ; Rejaei, B. ; Burghartz, J.N.

Author_Institution

ECTM-DIMES, TU Delft, Netherlands

fYear

2002

fDate

8-11 Dec. 2002

Firstpage

475

Lastpage

478

Abstract

Integrated solenoidal radio-frequency (RF) inductors and transformers with a ferromagnetic core are demonstrated by using a fully IC-compatible fabrication process. For a 500-nm-thick Ni/sub 80/Fe/sub 20/ film, a cut-off frequency of over 7.5 GHz for a 2.5-nH inductor is realized. Optimum inductor design based on tailored inductance, quality factor, and cut-off frequency is discussed. RF transformers realized have a coupling factor of /spl sim/70% up to 200 MHz.

Keywords

MMIC; Permalloy; ferromagnetic materials; inductors; magnetic anisotropy; magnetic cores; magnetic thin film devices; solenoids; transformers; 500 nm; 7.5 GHz; Ni/sub 80/Fe/sub 20/; cut-off frequency; ferromagnetic RF inductors; ferromagnetic RF transformers; fully IC-compatible fabrication process; inductor design; quality factor; solenoidal radio-frequency inductors; standard CMOS/BiCMOS; tailored inductance; BiCMOS integrated circuits; Inductors; Magnetic anisotropy; Magnetic films; Perpendicular magnetic anisotropy; Radio frequency; Semiconductor films; Solenoids; Spirals; Transformers;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2002. IEDM '02. International

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-7462-2

Type

conf

DOI

10.1109/IEDM.2002.1175882

Filename

1175882