Title :
Ferromagnetic RF inductors and transformers for standard CMOS/BiCMOS
Author :
Zhuang, Y. ; Vroubel, M. ; Rejaei, B. ; Burghartz, J.N.
Author_Institution :
ECTM-DIMES, TU Delft, Netherlands
Abstract :
Integrated solenoidal radio-frequency (RF) inductors and transformers with a ferromagnetic core are demonstrated by using a fully IC-compatible fabrication process. For a 500-nm-thick Ni/sub 80/Fe/sub 20/ film, a cut-off frequency of over 7.5 GHz for a 2.5-nH inductor is realized. Optimum inductor design based on tailored inductance, quality factor, and cut-off frequency is discussed. RF transformers realized have a coupling factor of /spl sim/70% up to 200 MHz.
Keywords :
MMIC; Permalloy; ferromagnetic materials; inductors; magnetic anisotropy; magnetic cores; magnetic thin film devices; solenoids; transformers; 500 nm; 7.5 GHz; Ni/sub 80/Fe/sub 20/; cut-off frequency; ferromagnetic RF inductors; ferromagnetic RF transformers; fully IC-compatible fabrication process; inductor design; quality factor; solenoidal radio-frequency inductors; standard CMOS/BiCMOS; tailored inductance; BiCMOS integrated circuits; Inductors; Magnetic anisotropy; Magnetic films; Perpendicular magnetic anisotropy; Radio frequency; Semiconductor films; Solenoids; Spirals; Transformers;
Conference_Titel :
Electron Devices Meeting, 2002. IEDM '02. International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7462-2
DOI :
10.1109/IEDM.2002.1175882
