Title :
Fully electronic DNA detection on a CMOS chip: device and process issues
Author :
Hofmann, F. ; Frey, A. ; Holzapfl, B. ; Schienle, M. ; Paulus, C. ; Schindler-Bauer, P. ; Kuhlmeier, D. ; Krause, J. ; Hintsche, R. ; Nebling, E. ; Albers, J. ; Gumbrecht, W. ; Plehnert, K. ; Eckstein, G. ; Thewes, R.
Author_Institution :
Corporate Res., Infineon Technol., Munich, Germany
Abstract :
A sensor array for fully electronic detection of DNA molecules is fabricated using an extended CMOS process. A gold deposition process module and a compartment are integrated in the CMOS backend process. DNA detection is performed using a redox-cycling based electrochemical technique. Process and device issues and the impact of different processing variants on the circuit performance of the chip are discussed in detail. The result of biological experiments on chips with 128 positions are shown to prove the success of the chosen approach.
Keywords :
CMOS integrated circuits; DNA; arrays; biological techniques; biosensors; electrochemical sensors; integrated circuit technology; Au; Au deposition process module; CMOS backend process; CMOS chip; DNA molecules; circuit performance; electronic DNA detection; extended CMOS process; processing variants; redox-cycling based electrochemical technique; sensor array; Biomedical optical imaging; Biosensors; CMOS process; CMOS technology; Circuits; DNA; Electrodes; Gold; Optical sensors; Sensor arrays;
Conference_Titel :
Electron Devices Meeting, 2002. IEDM '02. International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7462-2
DOI :
10.1109/IEDM.2002.1175886
