DocumentCode
3130229
Title
GaN films fabricated by ammoniating electrodeposited layers
Author
Wang, H. ; Chen, X.Y. ; Ng, A.M.C. ; Fang, F. ; Djurisic, Aleksandra B. ; Chan, W.K.
Author_Institution
Dept. of Phys., Univ. of Hong Kong, Hong Kong, China
fYear
2009
fDate
13-17 July 2009
Firstpage
1
Lastpage
2
Abstract
GaN films have been fabricated by ammoniating electrodeposited films. We have investigated the influence of electrodeposition parameters on the morphologies and structures of electrodeposited layers on Si(100) subtrates by using SEM and XRD.
Keywords
III-V semiconductors; X-ray diffraction; electrodeposits; gallium compounds; scanning electron microscopy; semiconductor growth; silicon; wide band gap semiconductors; GaN; Si(100); X-ray diffraction; ammoniating electrodeposited layers; scanning electron microscopy; semiconductor growth; Annealing; Gallium nitride; III-V semiconductor materials; Molecular beam epitaxial growth; Morphology; Optical films; Scanning electron microscopy; Semiconductor films; Substrates; X-ray scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
OptoElectronics and Communications Conference, 2009. OECC 2009. 14th
Conference_Location
Hong Kong
Print_ISBN
978-1-4244-4102-0
Electronic_ISBN
978-1-4244-4103-7
Type
conf
DOI
10.1109/OECC.2009.5219909
Filename
5219909
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