Electrically Injected Quantum Dot Photonic Crystal Microcavity Light-emitting Arrays with Air-bridge Nano-contacts

In this paper the characteristics of an electrically injected PC microcavity device with quantum dot (QD) active region and air-bridge electrical contacts to the PC microcavity is presented. Air bridges are 300nm tall, 300-500nm wide, 3-13mum long and have surface contact width ~200-300nm. Arrays of microcavity light emitters are fabricated by interconnecting multiple PC microcavities by nano-bridges. Robust metallic air-bridges are drawn to pedestal-supported PC microcavities with air-cladding on top and air/oxide cladding on the bottom. The QD heterostructure grown by molecular beam epitaxy (MBE) method. The oxide cladding improves both carrier and optical mode confinement which is been created by selective wet oxidation of 0.6mum Al_0.98Ga _0.02As layers below the active GaAs region with embedded QDs. Electroluminescence (EL) measurements on an isolated H2 microcavity show multiple resonances, corresponding to the cavity modes. Spectral characteristics of the array are similar to those of an isolated cavity with larger signal-noise ratio