High Q SAW resonator using upper-electrodes on grooved-electrodes in LiTaO3

Author

Kimura, Tetsuya ; Kadota, Michio ; Ida, Yasuyuki

Author_Institution

Murata Manuf. Co.Ltd., Nagaokakyo, Japan

fYear

2010

fDate

23-28 May 2010

Firstpage

1740

Lastpage

1743

Abstract

Al-electrodes on 36-48°YX-LiTaO₃ substrates have been widely used in surface acoustic wave (SAW) filters and SAW duplexers because of having an optimum electro-mechanical coupling factor, reflection coefficient and good Q-factor. In this paper, authors proposed and constructed a new SAW structure composed of upper Al-electrodes accumulated on lower grooved Cu-electrodes in the LiTaO₃ substrate, which has approximately same electro-mechanical coupling factor and reflection coefficient as the Al-electrodes (0.1λ)/36-48°YX-LiTaO₃ in order to realize high Q-factor. As the result, the SAW resonator having superior Q-factor was realized compared with that of Al-electrodes( 0.1λ)/42°YX-LiTaO₃ substrates.

Keywords

surface acoustic wave resonator filters; surface acoustic wave resonators; SAW duplexer; SAW structure; grooved-electrodes; high Q SAW resonator; optimum electro-mechanical coupling factor; reflection coefficient; superior Q factor; surface acoustic wave filter; upper-electrodes; Acoustic reflection; Acoustic waves; Artificial intelligence; Electric resistance; Electrodes; Gold; Q factor; Resonator filters; SAW filters; Surface acoustic waves; LiTaO3; SAW; grooved electrodes; resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International

Conference_Location

Anaheim, CA

ISSN

0149-645X

Print_ISBN

978-1-4244-6056-4

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2010.5516895

Filename

5516895