DocumentCode

3131090

Title

Structural Characteristics Of Bias Sputtered CoCrTa/ Cr Films

Author

Youping Deng ; Lambeth, D.N. ; Laughlin, D.E.

Author_Institution

Carnegie Mellon University

fYear

1993

fDate

13-16 April 1993

Keywords

Argon; Chromium; Grain boundaries; Lattices; Magnetic films; Radio frequency; Stress; Substrates; Voltage; X-ray diffraction;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1993. INTERMAG '93., Digest of International

Conference_Location

Stockhom, Sweden

Print_ISBN

0-7803-1310-0

Type

conf

DOI

10.1109/INTMAG.1993.642416

Filename

642416