Title :
Structural Characteristics Of Bias Sputtered CoCrTa/ Cr Films
Author :
Youping Deng ; Lambeth, D.N. ; Laughlin, D.E.
Author_Institution :
Carnegie Mellon University
Keywords :
Argon; Chromium; Grain boundaries; Lattices; Magnetic films; Radio frequency; Stress; Substrates; Voltage; X-ray diffraction;
Conference_Titel :
Magnetics Conference, 1993. INTERMAG '93., Digest of International
Conference_Location :
Stockhom, Sweden
Print_ISBN :
0-7803-1310-0
DOI :
10.1109/INTMAG.1993.642416
