DocumentCode
3131187
Title
Imaging Sub-micron Scale Light Confinement in Silicon Waveguides with Apertureless Transmission-based Near-field Scanning Optical Microscopy
Author
Robinson, Jacob T. ; Preble, Stefan F. ; Lipson, Michal
Author_Institution
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY
fYear
2006
fDate
Oct. 2006
Firstpage
693
Lastpage
694
Abstract
We measure transverse optical decay lengths on the order of ¿/30 in sub-micron scale silicon waveguides using Transmission-based Near-field Scanning Optical Microscopy (TraNSOM), and compare these measurements to theory.
Keywords
integrated optics; near-field scanning optical microscopy; optical variables measurement; optical waveguides; silicon; Si; apertureless transmission-based near-field scanning optical microscopy; silicon waveguides; sub-micron scale light confinement imaging; transverse optical decay length measurement; Optical imaging; Optical interferometry; Optical microscopy; Optical mixing; Optical scattering; Optical surface waves; Optical waveguides; Probes; Silicon; Tellurium;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE
Conference_Location
Montreal, QC, Canada
Print_ISBN
0-7803-9555-7
Electronic_ISBN
0-7803-9555-7
Type
conf
DOI
10.1109/LEOS.2006.278902
Filename
4054373
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