A novel robust TiN/AHO/TiN capacitor and CoSi/sub 2/ cell pad structure for 70nm stand-alone and embedded DRAM technology and beyond

Author

Park, J.M. ; Hwang, Y.S. ; Hwang, D.S. ; Hwang, H.K. ; Lee, S.H. ; Kim, G.Y. ; Jeong, M.Y. ; Park, Bong Joo ; Kim, S.E. ; Cho, M.H. ; Kim, Dong In ; Chung, J.-H. ; Park, I.S. ; Yoo, C.-Y. ; Lee, J.H. ; Nam, B.Y. ; Park, Y.R. ; Kim, Chang-Sei ; Sun, M.-C.

Author_Institution

Adv. Technol. Dev., Samsung Electron. Co, Kyunggi-Do, South Korea

fYear

2002

fDate

8-11 Dec. 2002

Firstpage

823

Lastpage

826

Abstract

For the first time, a novel robust (square-shape cylinder type) TiN/AHO (Al/sub 2/O/sub 3/-HfO/sub 2/)/TiN capacitor with Co-silicide on landing cell pad suitable for both stand-alone and embedded DRAMs are successfully developed with 88nm (pitch 176nm) feature size, which is the smallest feature size ever reported in DRAM technology, using ArF lithography for aiming 70nm stand-alone and embedded DRAM technology. The capacitor with Toxeq of 1.5nm and leakage current of less than 1 fA/cell is achieved. The cell contact resistance is greatly improved by using Co-silicidation on landing cell pad and metal storage node contact plug, which results in high performance.

Keywords

DRAM chips; MIM devices; alumina; capacitors; cobalt compounds; contact resistance; hafnium compounds; leakage currents; titanium compounds; 70 nm; ArF lithography; Co-silicidation; CoSi/sub 2/; CoSi/sub 2/ landing cell pad; TiN-Al/sub 2/O/sub 3/HfO/sub 2/-TiN; TiN/AHO/TiN capacitor; contact resistance; embedded DRAM; equivalent oxide thickness; leakage current; metal storage node contact plug; stand-alone DRAM; Atherosclerosis; Capacitance; Contact resistance; Leakage current; MIM capacitors; Plugs; Random access memory; Robust stability; Robustness; Tin;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2002. IEDM '02. International

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-7462-2

Type

conf

DOI

10.1109/IEDM.2002.1175964

Filename

1175964