DocumentCode
3131641
Title
2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (IEEE Cat. No.01CH37160)
fYear
2001
fDate
23-24 April 2001
Abstract
The following topics were dealt with. Factory dynamics; process control; advanced process technology; yield modelling and analysis; and defect detection and reduction
Keywords
factory automation; integrated circuit manufacture; integrated circuit technology; process control; semiconductor process modelling; advanced process technology; defect detection; defect reduction; factory dynamics; process control; yield modelling;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI
Conference_Location
Munich, Germany
ISSN
1078-8743
Print_ISBN
0-7803-6555-0
Type
conf
DOI
10.1109/ASMC.2001.925601
Filename
925601
Link To Document