Title :
Quantifying operational time variability: the missing parameter for cycle time reduction
Author :
Jacobs, J.H. ; Etman, L.F.P. ; Rooda, J.E. ; Van Campen, E.J.J.
Author_Institution :
Syst. Eng. Group, Eindhoven Univ. of Technol., Netherlands
Abstract :
Operational time variability is one of the key parameters determining the average cycle time of lots. Many different sources of variability can be identified such as equipment breakdowns, set-up, and operator availability. However, an appropriate measure to quantify variability is missing. Measures such as the overall equipment efficiency (OEE) in the semiconductor industry are entirely based on mean value analysis and do not include variances. The main contribution of this paper is the development of a new algorithm that enables estimation of the mean effective process time te and the coefficient of variation ce2 of a multiple machine equipment family from real fab data. The algorithm formalizes the effective process time definitions as given by Hopp and Spearman (2000), and Sattler (1996). The algorithm quantifies the claims of machine capacity by lots, which includes time losses due to down time, set-up time, or other irregularities. The estimated te and ce 2 values can be interpreted in accordance with the well-known G/G/m queueing relations. A test example as well as an elaborate case from the semiconductor industry show the potential of the new effective process time (EPT) algorithm for cycle time reduction programs
Keywords :
integrated circuit manufacture; manufacturing resources planning; production control; queueing theory; semiconductor process modelling; G/G/m queueing relations; average lot cycle time; coefficient of variation; cycle time reduction; cycle time reduction programs; down time; effective process time algorithm; effective process time definitions; equipment breakdowns; equipment set-up; machine capacity; mean effective process time; mean value analysis; multiple machine equipment family; operational time variability; operational time variability quantification; operator availability; overall equipment efficiency; semiconductor industry; set-up time; time losses; variability sources; variances; Analysis of variance; Conductors; Electric breakdown; Electronics industry; Jacobian matrices; Productivity; Semiconductor device manufacture; Systems engineering and theory; Tellurium; Time measurement;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI
Conference_Location :
Munich
Print_ISBN :
0-7803-6555-0
DOI :
10.1109/ASMC.2001.925605