Title :
X-Y positioner driven by electrostatic motor
Author :
Niino, Toshiki ; Ban, Takahisa ; Yamamoto, Akio ; Higuchi, Toshiro
Abstract :
An X-Y positioner driven by an electrostatic motor named the dual excitation electrostatic motor was developed. Unique configuration of the positioner utilizing a characteristic of the motor balances inertia mass in the two axes to achieve good dynamic characteristics of the positioner. A prototype positioner was fabricated and tested. The prototype generated a thrust force of approximately 35 N in each axis, and a positioning resolution of 200 μm was obtained. To improve the resolution, the electrode structure of the motor was modified, and very smooth motion was obtained
Keywords :
electrostatic devices; micromotors; position control; X-Y positioner; dual excitation electrostatic motor; dynamic characteristics; electrode structure; electrostatic motor; inertia mass balancing; positioning resolution; smooth motion; thrust force; AC generators; Chemical technology; Electrodes; Electrostatics; Micromotors; Prototypes; Stators; Synchronous motors; Testing; Voltage;
Conference_Titel :
Industry Applications Conference, 1996. Thirty-First IAS Annual Meeting, IAS '96., Conference Record of the 1996 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-3544-9
DOI :
10.1109/IAS.1996.563845
